A Machine Vision Architecture For Integrated Circuit Inspection

Sal D' Agostino

doi:10.1117/12.953126

19 July 1989 A Machine Vision Architecture For Integrated Circuit Inspection

Sal D' Agostino

Proceedings Volume 1087, Integrated Circuit Metrology, Inspection, and Process Control III; (1989) https://doi.org/10.1117/12.953126
Event: 1989 Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States

Abstract

The paper presents a machine vision architecture which can address a wide range of machine vision applications in the manufacture of integrated circuits. A brief review of current applications and the reasons for the success of machine vision in the industry are also presented.

Citation Download Citation

Sal D' Agostino "A Machine Vision Architecture For Integrated Circuit Inspection", Proc. SPIE 1087, Integrated Circuit Metrology, Inspection, and Process Control III, (19 July 1989); https://doi.org/10.1117/12.953126

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