Study on eliminating the effect of parasitic reflection on deflectometry measurement of planar optical element surface figure

Ruiyang Wang; Dahai Li; Kaiyuan Xu; Lei Tang; Pengyu Chen

doi:10.1117/12.2506462

30 January 2019 Study on eliminating the effect of parasitic reflection on deflectometry measurement of planar optical element surface figure

Ruiyang Wang, Dahai Li, Kaiyuan Xu, Lei Tang, Pengyu Chen

Author Affiliations +

Proceedings Volume 10841, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Meta-Surface-Wave and Planar Optics; 1084119 (2019) https://doi.org/10.1117/12.2506462
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

Phase measuring deflectometry (PMD) with structured light projection and phase-shifting technique is a highly accurate optical surface measuring method. For surface shape measurement of transparent planar elements, PMD suffers from parasitic reflection. To avoid the unwanted effect of parasitic reflection, a method based on fringe frequency tuning and Fourier-transform is introduced in this paper. Numerical simulations and experiments are both conducted to evaluate the performance of the proposed method. An optical planar element with a thickness of 24.5mm is measured, and measurement error is within 200nm PV.

Citation Download Citation

Ruiyang Wang, Dahai Li, Kaiyuan Xu, Lei Tang, and Pengyu Chen "Study on eliminating the effect of parasitic reflection on deflectometry measurement of planar optical element surface figure", Proc. SPIE 10841, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Meta-Surface-Wave and Planar Optics, 1084119 (30 January 2019); https://doi.org/10.1117/12.2506462

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