Investigation of physical properties of ZnO semiconductor material for biocompatible coating layer applications

Przemyslaw Struk; Michal A. Borysiewicz

doi:10.1117/12.2503228

14 August 2018 Investigation of physical properties of ZnO semiconductor material for biocompatible coating layer applications

Przemyslaw Struk, Michal A. Borysiewicz

Author Affiliations +

Proceedings Volume 10830, 13th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods; 108300L (2018) https://doi.org/10.1117/12.2503228
Event: Thirteenth Integrated Optics: Sensors, Sensing Structures and Methods Conference, 2018, Szcyrk, Poland

Abstract

The paper presents investigation of physical properties of ZnO semiconductor for biomedical applications as a coating layer for example in medical devices and structures. The research was focused on determination of surface topography by SEM method, surface roughness by AFM method, chemical composition by EDS method and crystalline structure of ZnO by Raman spectroscopy. The investigated ZnO coating was deposited by reactive magnetron sputtering on quartz substrate.

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Przemyslaw Struk and Michal A. Borysiewicz "Investigation of physical properties of ZnO semiconductor material for biocompatible coating layer applications", Proc. SPIE 10830, 13th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, 108300L (14 August 2018); https://doi.org/10.1117/12.2503228

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