CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 10810 > Article
Paper
3 October 2018 Recent bottom layered half-tone mask blanks development for large sized and high resolution flat panel displays
Narihiro Morosawa, Yasunori Noguchi, Satoru Mochizuki, Kagehiro Kageyama
Author Affiliations +
Proceedings Volume 10810, Photomask Technology 2018; 108101J (2018) https://doi.org/10.1117/12.2501511
Event: SPIE Photomask Technology + Extreme Ultraviolet Lithography, 2018, Monterey, California, United States
Abstract
Half-tone masks are essential for process reduction and shape control of photo reactive organic material in FPD, the importance of half-tone masks is increasing in recent large sized and high resolution displays. Half-tone masks are categorized as top layer type and bottom layer type. Process reduction and short term mask production are possible in bottom layer half-tone mask. Therefore it is expected that the demand of bottom layer half-tone mask will be increasing in future. Ulvac coating has developed two types of bottom layer half-tone mask blanks which half-tone layers are composed in Cr material or MoSi material respectively. Since each bottom layer half-tone mask blanks has different advantage in process and characteristics, it is possible to select half-tone mask blank by customer requirement. We will discuss process and characteristics of two types bottom layer half-tone mask blanks in this meeting.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Narihiro Morosawa, Yasunori Noguchi, Satoru Mochizuki, and Kagehiro Kageyama "Recent bottom layered half-tone mask blanks development for large sized and high resolution flat panel displays", Proc. SPIE 10810, Photomask Technology 2018, 108101J (3 October 2018); https://doi.org/10.1117/12.2501511
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 6 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Chromium
Transmittance
Etching
Glasses
Flat panel displays
Wet etching
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top