Specification and measurement of uncertainty in phase shifting Fizeau interferometry

Brent C. Bergner

doi:10.1117/12.2323640

18 August 2018 Specification and measurement of uncertainty in phase shifting Fizeau interferometry

Brent C. Bergner

Proceedings Volume 10749, Interferometry XIX; 107490S (2018) https://doi.org/10.1117/12.2323640
Event: SPIE Optical Engineering + Applications, 2018, San Diego, California, United States

Abstract

Understanding measurement uncertainty is critical for qualifying an instrument for a specific task and for improving the instrument’s performance. Specifying that uncertainty requires a precise definition of the particular quantity being measured and the conditions under which it is measured. These should both be relevant to the end user’s application. In this paper I re-examine and summarize some of the definitions and test methods that have been used to characterize Fizeau interferometers and attempt to encourage a discussion about how to best specify the performance of Fizeau interferometers for today’s demanding applications.

Conference Presentation

Citation Download Citation

Brent C. Bergner "Specification and measurement of uncertainty in phase shifting Fizeau interferometry", Proc. SPIE 10749, Interferometry XIX, 107490S (18 August 2018); https://doi.org/10.1117/12.2323640

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available