CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 10678 > Article
Presentation
24 May 2018 New challenges in light scattering analysis of complex optical components (Conference Presentation)
Myriam Zerrad, Michel Lequime, Simona Liukaityte, Claude Amra
Author Affiliations +
Proceedings Volume 10678, Optical Micro- and Nanometrology VII; 106780I (2018) https://doi.org/10.1117/12.2310069
Event: SPIE Photonics Europe, 2018, Strasbourg, France
Abstract
Theory and experiment in the field of light scattering from optical coatings have been extensively studied and controlled since the 90’s. Indeed surface and bulk theories were developed for substrates and optical coatings, and have revealed great agreement with experiment. Furthermore, angle-resolved apparatuses were built with detection limits close to scattering from the air particles. All these tools have allowed to characterize roughnesses lower than 0.1 nm; also, the microstructure of thin film layers was investigated versus the deposition technologies. Nevertheless, in the last few years, new challenges for light scattering have merged. Actually, modern deposition technologies with their sophisticated monitoring systems today enable the deposition of large numbers of layers, hence providing complex filters which must be characterized at their working wavelengths or in a wide spectral region. Moreover an increasing demand for micro-structured filters has merged and requires new procedures to discriminate scattering from all micro-devices. In this context, we have developed in our group at Institut FRESNEL new numerical and metrological tools to satisfy these demands. All scattering facilities were rebuilt and upgraded, sometimes with strongly different principles. In this paper, we will present a rapid overview of these developments, with a focus on broad band scattering metrology (400nm-100nm) with no loss of performance, separation of intrinsic (surface profile) and extrinsic (local defects) roughness, and the control of large-angle scattering in ultra-narrow band filters. Examples and applications will be given to emphasize all improvements.
Conference Presentation
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Myriam Zerrad, Michel Lequime, Simona Liukaityte, and Claude Amra "New challenges in light scattering analysis of complex optical components (Conference Presentation)", Proc. SPIE 10678, Optical Micro- and Nanometrology VII, 106780I (24 May 2018); https://doi.org/10.1117/12.2310069
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Light scattering
Scattering
Optical components
Metrology
Optical coatings
Optical filters
Particles
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top