Design of measurement system of 3D surface profile based on chromatic confocal technology

An-su Wang; Bin Xie; Zi-wei Liu

doi:10.1117/12.2295170

10 January 2018 Design of measurement system of 3D surface profile based on chromatic confocal technology

An-su Wang, Bin Xie, Zi-wei Liu

Proceedings Volume 10616, 2017 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments; 1061618 (2018) https://doi.org/10.1117/12.2295170
Event: International Conference on Optical Instruments and Technology 2017, 2017, Beijing, China

Abstract

Chromatic confocal 3D profilometer has widely used in science investigation and industry fields recently for its high precision, great measuring range and numerical surface characteristic. It can provide exact and omnidirectional solution for manufacture and research by 3D non-contact surface analysis technique. The article analyzes the principle of surface measurement with chromatic confocal technology, and provides the designing indicators and requirements of the confocal system. As the key component, the dispersive objective used to achieve longitudinal focus vibration with wavelength was designed. The objective disperses the focus of wavelength between 400~700 nm to 15 mm longitudinal range. With selected spectrometer, the resolution of chromatic confocal 3D profilometer is no more than 5 μm, which can meet needs for the high precision non-contact surface profile measurement.

Citation Download Citation

An-su Wang, Bin Xie, and Zi-wei Liu "Design of measurement system of 3D surface profile based on chromatic confocal technology", Proc. SPIE 10616, 2017 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 1061618 (10 January 2018); https://doi.org/10.1117/12.2295170

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