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26 January 2018 Development of an InGaAs SPAD 2D array for flash LIDAR
Takashi Baba, Yoshihito Suzuki, Kenji Makino, Takuya Fujita, Tatsuya Hashi, Shunsuke Adachi, Shigeyuki Nakamura, Koei Yamamoto
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Proceedings Volume 10540, Quantum Sensing and Nano Electronics and Photonics XV; 105400L (2018) https://doi.org/10.1117/12.2289270
Event: SPIE OPTO, 2018, San Francisco, California, United States
Abstract
An InGaAs Single-Photon Avalanche Photodiode (SPAD) array and a hybrid photon-counting image sensor have been developed for time-resolved applications in the near infrared region, especially for Flash LIDAR. The implemented array has a 100 μm pitch 32×32 matrix, and the active area in each pixel has a diameter of 12 μm. A dedicated read-out IC incorporates an active quenching and recharge circuit, and an in-pixel time-to-digital converter with 318 ps resolution for providing stable Geiger-mode operation of the InGaAs SPAD pixels and a simultaneous time-resolving function. The uniformity of the electrical field in the entire two-dimensional area is one of the key characteristics as it affects most performance parameters. The breakdown voltage mapping revealed the SPAD array has an excellent uniformity. Full characterizations of dark count rate, photon detection probability, and timing jitter were performed and will be discussed. Methods of suppressing afterpulses were examined by utilizing an adjustable hold-off function. The results showed that the function worked effectively to reduce the afterpulse probability. Finally we prove that the InGaAs SPAD image sensor has the capability of accurate timing detection for constructing a flash LIDAR in the near future.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Takashi Baba, Yoshihito Suzuki, Kenji Makino, Takuya Fujita, Tatsuya Hashi, Shunsuke Adachi, Shigeyuki Nakamura, and Koei Yamamoto "Development of an InGaAs SPAD 2D array for flash LIDAR", Proc. SPIE 10540, Quantum Sensing and Nano Electronics and Photonics XV, 105400L (26 January 2018); https://doi.org/10.1117/12.2289270
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Cited by 5 scholarly publications and 4 patents.
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KEYWORDS
Indium gallium arsenide
Picosecond phenomena
Sensors
Readout integrated circuits
Clocks
Image sensors
LIDAR
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