Electrical micro-heating structures on glass created by laser ablation

M. Neitz; G. Böttger; M. Queisser; N. Arndt-Staufenbiel; M. Schneider-Ramelow

doi:10.1117/12.2290049

16 February 2018 Electrical micro-heating structures on glass created by laser ablation

M. Neitz, G. Böttger, M. Queisser, N. Arndt-Staufenbiel, M. Schneider-Ramelow

Proceedings Volume 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII; 105190G (2018) https://doi.org/10.1117/12.2290049
Event: SPIE LASE, 2018, San Francisco, California, United States

Abstract

Addressing the need for fast design cycles and tooling in the assembly of small structures, a flexible approach to overcome the obstacles of current time-consuming manufacturing methods is needed. Additionally, assembly of small and especially optical structures is often limited concerning the application and curing of adhesives used for joining. Local heating structures can be seen as an ideal way of solving this issue. This paper shows the simulation and flexible laser structuring of miniaturized heating. Mask-based large panel physical vapor deposition (PVD) processes and subsequent laser processing appear to be economical and flexible, and are compared to standard panel level lithography processes.

Citation Download Citation

M. Neitz, G. Böttger, M. Queisser, N. Arndt-Staufenbiel, and M. Schneider-Ramelow "Electrical micro-heating structures on glass created by laser ablation", Proc. SPIE 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII, 105190G (16 February 2018); https://doi.org/10.1117/12.2290049

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