Ultra-short pulse fiber beam delivery in micromachining applications

Max C. Funck; Sebastian Eilzer; Björn Wedel

doi:10.1117/12.2298398

20 February 2018 Ultra-short pulse fiber beam delivery in micromachining applications

Max C. Funck, Sebastian Eilzer, Björn Wedel

Proceedings Volume 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII; 105190A (2018) https://doi.org/10.1117/12.2298398
Event: SPIE LASE, 2018, San Francisco, California, United States

Abstract

Fiber beam delivery of high power pico- and femtosecond pulses offers many advantages in industrial application. This includes flexible beam delivery, easy integration into machines and production environment as well as laser safety and robustness. Using micro-structured hollow core fibers nearly single mode transmission of ultra-short pulses with excellent beam quality can be achieved over several meters and has been reported in numerous publications during the last couple of years. Laser light cables and beam delivery systems with these fibers are now available and capable of delivering pulses of several 100 μJ with 90% transmission over 10 m long fibers while maintaining excellent beam quality (M2 1.2 - 1.4). For successful industrial application, several additional factors need to be taken into account. This includes system robustness against changing laser input parameters as the output of a laser source can change, robustness against fiber bending in applications with dynamically moved fiber as well as operation free of maintenance and realignment. In order to address these, the relevant effects impacting the performance of fiber delivered laser pulses have been studied. We will report experimental results of fiber bending effects on beam parameters critical for micromachining applications and analyze the influence of laser to fiber coupling. In addition, micromachining applications employing a modular fiber beam delivery system will be shown and the impact of induced beam parameter changes on the micromachining process discussed.

Citation Download Citation

Max C. Funck, Sebastian Eilzer, and Björn Wedel "Ultra-short pulse fiber beam delivery in micromachining applications", Proc. SPIE 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII, 105190A (20 February 2018); https://doi.org/10.1117/12.2298398

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available