Micro-hole array fluorescent sensor based on AC-Dielectrophoresis (DEP) for simultaneous analysis of nano-molecules

Hye Jin Kim; Dong-Hoon Kang; Eunji Lee; Kyo Seon Hwang; Hyun-Joon Shin; Jinsik Kim

doi:10.1117/12.2291359

12 February 2018 Micro-hole array fluorescent sensor based on AC-Dielectrophoresis (DEP) for simultaneous analysis of nano-molecules

Hye Jin Kim, Dong-Hoon Kang, Eunji Lee, Kyo Seon Hwang, Hyun-Joon Shin, Jinsik Kim

Author Affiliations +

Proceedings Volume 10484, Advanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI; 104840I (2018) https://doi.org/10.1117/12.2291359
Event: SPIE BiOS, 2018, San Francisco, California, United States

Abstract

We propose a simple fluorescent bio-chip based on two types of alternative current-dielectrophoretic (AC-DEP) force, attractive (positive DEP) and repulsive (negative DEP) force, for simultaneous nano-molecules analysis. Various radius of micro-holes on the bio-chip are designed to apply the different AC-DEP forces, and the nano-molecules are concentrated inside the micro-hole arrays according to the intensity of the DEP force. The bio-chip was fabricated by Micro Electro Mechanical system (MEMS) technique, and was composed of two layers; a SiO₂ layer and Ta/Pt layer were accomplished for an insulation layer and a top electrode with micro-hole arrays to apply electric fields for DEP force, respectively. Each SiO₂ and Ta/Pt layers were deposited by thermal oxidation and sputtering, and micro-hole arrays were fabricated with Inductively Coupled Plasma (ICP) etching process. For generation of each positive and negative DEP at micro-holes, we applied two types of sine-wave AC voltage with different frequency range alternately. The intensity of the DEP force was controlled by the radius of the micro-hole and size of nano-molecule, and calculated with COMSOL multi-physics. Three types of nano-molecules labelled with different fluorescent dye were used and the intensity of nano-molecules was examined by the fluorescent optical analysis after applying the DEP force. By analyzing the fluorescent intensities of the nano-molecules, we verify the various nano-molecules in analyte are located successfully inside corresponding micro-holes with different radius according to their size.

Conference Presentation

Citation Download Citation

Hye Jin Kim, Dong-Hoon Kang, Eunji Lee, Kyo Seon Hwang, Hyun-Joon Shin, and Jinsik Kim "Micro-hole array fluorescent sensor based on AC-Dielectrophoresis (DEP) for simultaneous analysis of nano-molecules", Proc. SPIE 10484, Advanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI, 104840I (12 February 2018); https://doi.org/10.1117/12.2291359

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