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24 October 2017 Error analysis and correction of lever-type stylus profilometer based on Nelder-Mead Simplex method
Chunbing Hu, Suping Chang, Bo Li, Junwei Wang, Zhongyu Zhang
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Proceedings Volume 10458, AOPC 2017: 3D Measurement Technology for Intelligent Manufacturing; 1045802 (2017) https://doi.org/10.1117/12.2281174
Event: Applied Optics and Photonics China (AOPC2017), 2017, Beijing, China
Abstract
Due to the high measurement accuracy and wide range of applications, lever-type stylus profilometry is commonly used in industrial research areas. However, the error caused by the lever structure has a great influence on the profile measurement, thus this paper analyzes the error of high-precision large-range lever-type stylus profilometry. The errors are corrected by the Nelder-Mead Simplex method, and the results are verified by the spherical surface calibration. It can be seen that this method can effectively reduce the measurement error and improve the accuracy of the stylus profilometry in large-scale measurement.
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Chunbing Hu, Suping Chang, Bo Li, Junwei Wang, and Zhongyu Zhang "Error analysis and correction of lever-type stylus profilometer based on Nelder-Mead Simplex method", Proc. SPIE 10458, AOPC 2017: 3D Measurement Technology for Intelligent Manufacturing, 1045802 (24 October 2017); https://doi.org/10.1117/12.2281174
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KEYWORDS
Error analysis
Profilometers
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