Fabrication of cylindrical micro-parts using synchronous rotary scan-projection lithography and chemical etching

Kaiki Ito; Yuta Suzuki; Toshiyuki Horiuchi

doi:10.1117/12.2284735

16 October 2017 Fabrication of cylindrical micro-parts using synchronous rotary scan-projection lithography and chemical etching

Kaiki Ito, Yuta Suzuki, Toshiyuki Horiuchi

Author Affiliations +

Proceedings Volume 10451, Photomask Technology 2017; 104510G (2017) https://doi.org/10.1117/12.2284735
Event: SPIE Photomask Technology and EUV Lithography, 2017, Monterey, California, United States

Abstract

Lithographical patterning on the surface of a fine pipe with a thin wall is required for fabricating three-dimensional micro-parts. For this reason, a new exposure system was developed for printing patterns on a cylindrical pipe. In the exposure system, the pipe was rotated 360° synchronous to a linear scan of a reticle. Stent-like resist patterns with a mean width of 185 μm were printed on a surface of stainless-steel pipe 2 mm in diameter. Next, the patterned pipe was chemically etched and stent-like meshed pipes with a mean mesh width of 110 μm were fabricated.

Conference Presentation

Citation Download Citation

Kaiki Ito, Yuta Suzuki, and Toshiyuki Horiuchi "Fabrication of cylindrical micro-parts using synchronous rotary scan-projection lithography and chemical etching", Proc. SPIE 10451, Photomask Technology 2017, 104510G (16 October 2017); https://doi.org/10.1117/12.2284735

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