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The development of industrial infrastructure for EUV lithography requires a wide array of optics beyond the mask and the scanner optics, which include optics for critical instruments such as exposure testing and actinic inspection. This paper will detail recent results in the production of a variety of high-precision multilayer coatings achieved to support this development. It is critical that the optical designs factor in the capabilities of the achievable multilayer gradients and the associated achievable precision, including impact to surface distortion from the added figure error of the multilayer coating, which adds additional requirements of a specific shape to the period distribution. For example, two different coatings may achieve a ±0.2% variation in multilayer period, but have considerably different added figure error.
Part I of the paper will focus on radially-symmetric spherical and aspherical optics. Typical azimuthal uniformity (variation at a fixed radius) achieved is less than ±0.005nm total variation, including measurement precision, on concave optics up to 200mm diameter. For highly curved convex optics (radius of curvature less than 50mm), precision is more challenging and the total variation increases to ±0.01nm total variation for optics 10-30mm in diameter. Total added figure error achieved has been as low as 0.05nm.
Part II of the paper will focus on multilayer designs graded in two directions, rather than radially, in order to accommodate the increased complexity of elliptical, toroidal and hyperbolic surfaces. In most cases, the symmetry of the required multilayer gradient does not match the symmetry of the optical surface, and this interaction must be countered via the process design. Achieving such results requires additional flexibility in the design of the deposition equipment, and will be discussed with several examples in the paper, such as the use of variable velocity of an inline substrate carrier in conjunction with a shaped target aperture to produce ±0.03nm total variation on an off-axis elliptical surface.
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