Full size x-ray grating fabrication using large area nanoimprint

D. L. Voronov; P. Lum; H. A. Padmore

doi:10.1117/12.2279436

23 August 2017 Full size x-ray grating fabrication using large area nanoimprint

D. L. Voronov, P. Lum, H. A. Padmore

Proceedings Volume 10386, Advances in X-Ray/EUV Optics and Components XII; 1038607 (2017) https://doi.org/10.1117/12.2279436
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

We developed a process for fabrication of ultra-precise blazed diffraction gratings for high resolution x-ray spectroscopy. The process based on nanofabrication techniques provides high fidelity for groove placement, high groove density, and perfect saw-tooth profile of grating grooves. A grating pattern is recorded on a quartz plate by use of e-beam lithography with a nanometer scale accuracy over the grating size. The pattern is transferred to a grating substrate by large area nanoimprint and then a hard Cr mask is formed via a lift-off process. Fidelity of the transfer step in terms of groove placement accuracy was investigated by differential wavefront interferometry. Anisotropic wet etch was applied to the patterned Si single crystal substrate to shape triangular grooves. Fabrication of a blazed grating of area 120 mm × 30 mm with groove density of 2000 lines/mm was demonstrated.

Conference Presentation

Citation Download Citation

D. L. Voronov, P. Lum, and H. A. Padmore "Full size x-ray grating fabrication using large area nanoimprint", Proc. SPIE 10386, Advances in X-Ray/EUV Optics and Components XII, 1038607 (23 August 2017); https://doi.org/10.1117/12.2279436

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available