Fizeau stitching at the European Synchrotron Radiation Facility (ESRF)

Amparo Vivo; Raymond Barrett

doi:10.1117/12.2274745

7 September 2017 Fizeau stitching at the European Synchrotron Radiation Facility (ESRF)

Amparo Vivo, Raymond Barrett

Proceedings Volume 10385, Advances in Metrology for X-Ray and EUV Optics VII; 103850N (2017) https://doi.org/10.1117/12.2274745
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

X-ray mirror figure errors are commonly measured in the synchrotron community using Long Trace Profiler (LTP) or Nanometer Optical measuring Machine (NOM) instruments, both providing 2D slope measurement. 3D reconstruction is possible but time consuming, and requires a high stability of environmental conditions over long periods which is not easy to achieve. Characterisation of the complete topography of the mirror surface is essential for the application of deterministic figure correction techniques and also to reveal undesired stresses or deformations, such as twist, introduced by optomechanical mounting. At the ESRF metrology laboratory Fizeau stitching methods are under development. A full automated mechanical setup dedicated to stitching measurement of long flat mirrors is now operational. We have previously demonstrated accurate reconstruction by stitching 2D profiles acquired from Fizeau subaperture measurements. This work is focused on 3D reconstruction of flat mirror surfaces up to one meter long. Repeatability, accuracy and in particular the influence of the transmission element will be discussed.

Citation Download Citation

Amparo Vivo and Raymond Barrett "Fizeau stitching at the European Synchrotron Radiation Facility (ESRF)", Proc. SPIE 10385, Advances in Metrology for X-Ray and EUV Optics VII, 103850N (7 September 2017); https://doi.org/10.1117/12.2274745

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