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Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 10294, including the Title Page, Copyright information, Table of Contents, and Conference Committee listing.
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© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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"Front Matter: Volume 10294", Proc. SPIE 10294, Optical Metrology: A Critical Review, 1029401 (19 July 1999); https://doi.org/10.1117/12.2284243
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KEYWORDS
Near field optics
Geometrical optics
Spectroscopic ellipsometry
Metrology
Natural surfaces
Scatterometry
Thin films
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