Electro-optical converter of zero-order and second-order Bessel laser beams for the photolithography systems

V. D. Paranin; S. N. Khonina

doi:10.1117/12.2264691

30 December 2016 Electro-optical converter of zero-order and second-order Bessel laser beams for the photolithography systems

V. D. Paranin, S. N. Khonina

Author Affiliations +

Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102241M (2016) https://doi.org/10.1117/12.2264691
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation

Abstract

The electro-optical element for converting of zero-order and second-order Bessel laser beams based on strontium – barium niobate crystal has been developed. The theoretical research of electrically tunable beam switching has been carried out for various diffractive axicons with periods 1.3 μm, 2 μm, 4 μm and a crystal with 9.7 mm length. The research showed maximum sensitivity of output beam intensity for axicon period 1.3 μm. The calculated switching voltage for this case was about 800 V.

Citation Download Citation

V. D. Paranin and S. N. Khonina "Electro-optical converter of zero-order and second-order Bessel laser beams for the photolithography systems", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241M (30 December 2016); https://doi.org/10.1117/12.2264691

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