Practical Aspects Of Pumping Systems For Optical Coating

P. R. Denton; D. Boyarsky; A. Musset; I. C. Stevenson

doi:10.1117/12.950012

27 February 1989 Practical Aspects Of Pumping Systems For Optical Coating

P. R. Denton, D. Boyarsky, A. Musset, I. C. Stevenson

Proceedings Volume 1019, Thin Film Technologies III; (1989) https://doi.org/10.1117/12.950012
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

The objective of this paper is to discuss practical aspects of pumping systems typically used in precision optical coating systems. The paper is directed at thin film technologists, engineers and technicians and will only touch lightly on vacuum pumping theory. We shall provide data from actual production systems that can be a useful guide to purchasers of optical coating systems on how pumping systems should be configured. We will also attempt to identify common problems relating to specific pumps and processes that users should anticipate and avoid.

Citation Download Citation

P. R. Denton, D. Boyarsky, A. Musset, and I. C. Stevenson "Practical Aspects Of Pumping Systems For Optical Coating", Proc. SPIE 1019, Thin Film Technologies III, (27 February 1989); https://doi.org/10.1117/12.950012

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