Measurement of an ambient air leak by diode laser absorption spectroscopy

Alexander K. Chernyshov; Pavel A. Mikheyev

doi:10.1117/12.2268278

14 December 2016 Measurement of an ambient air leak by diode laser absorption spectroscopy

Alexander K. Chernyshov, Pavel A. Mikheyev

Proceedings Volume 10176, Asia-Pacific Conference on Fundamental Problems of Opto- and Microelectronics; 101760T (2016) https://doi.org/10.1117/12.2268278
Event: Asia-Pacific Conference on Fundamental Problems of Opto- and Microelectronics, 2016, Khabarovsk, Russia

Abstract

Absorption spectroscopy measurements of long-lived metastable argon atoms Ar* in a low-pressure RF-discharge were carried out to measure gas leaks in a vacuum chamber. Argon as a carrier gas was flowing through the test chamber and the discharge cell at a rate of 55 μmol/s. If a leak occurs, the ambient air is admixed to the carrier gas flowing through the test chamber. The presence of air in the carrier gas flowing through the discharge plasma produced a decrease in the number density of Ar*, which was measured by means of diode laser absorption spectroscopy. This is because the lifetime of atoms is limited by losses due to collisions with air molecules. The leak-rate of the ambient air ranged from 0.14 to 0.95 μmol/s was measured by a mass flow meter and compared with the amplitude of the absorption signal.

Citation Download Citation

Alexander K. Chernyshov and Pavel A. Mikheyev "Measurement of an ambient air leak by diode laser absorption spectroscopy ", Proc. SPIE 10176, Asia-Pacific Conference on Fundamental Problems of Opto- and Microelectronics, 101760T (14 December 2016); https://doi.org/10.1117/12.2268278

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