The Design Of Excimer Lasers For Use In Microlithography

T. A. Znotins; T. J. McKee; S. J. Gutz; K. O. Tan; W. B. Norris

doi:10.1117/12.968445

1 January 1988 The Design Of Excimer Lasers For Use In Microlithography

T. A. Znotins, T. J. McKee, S. J. Gutz, K. O. Tan, W. B. Norris

Proceedings Volume 0922, Optical/Laser Microlithography; (1988) https://doi.org/10.1117/12.968445
Event: Santa Clara Symposium on Microlithography, 1988, Santa Clara, CA, United States

Abstract

This paper discusses the different factors which need to be addressed in the development of excimer lasers for use in microlithography. Included is a brief description of the basics of excimer laser technology and a short history of the use of excimer lasers in microlithography. Emphasis is placed on the differences between excimer lasers designed for use in microlithography and conventional excimer lasers. The paper concludes with a discussion of maintenance issues and operating costs.

Citation Download Citation

T. A. Znotins, T. J. McKee, S. J. Gutz, K. O. Tan, and W. B. Norris "The Design Of Excimer Lasers For Use In Microlithography", Proc. SPIE 0922, Optical/Laser Microlithography, (1 January 1988); https://doi.org/10.1117/12.968445

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available