A Laser Measurement System For Precise And Fast Positioning

Sadao Mori; Toshio Akatsu; Chuuichi Miyazaki

doi:10.1117/12.978909

1 January 1987 A Laser Measurement System For Precise And Fast Positioning

Sadao Mori, Toshio Akatsu, Chuuichi Miyazaki

Proceedings Volume 0818, Current Developments in Optical Engineering II; (1987) https://doi.org/10.1117/12.978909
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

A laser measurement system for precise and fast positioning of an object has been developed. When the speed is low, the movement of the object is measured by comparing the phase change of a light reflected by the object with the phase modulated by an electro-optic crystal (an active device by which the optical phase can be controlled by applying a voltage thereto). When the speed is high the movement is measured using a fringe counting technique. The system achieved an accuracy of 4nm, and a maximum allowable measurement speed of 1100mm/s.

Citation Download Citation

Sadao Mori, Toshio Akatsu, and Chuuichi Miyazaki "A Laser Measurement System For Precise And Fast Positioning", Proc. SPIE 0818, Current Developments in Optical Engineering II, (1 January 1987); https://doi.org/10.1117/12.978909

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