Surface Measurements With A Non-Contact Nomarski-Profiling Instrument

Thomas C. Bristow; Dag Lindquist

doi:10.1117/12.941759

23 March 1987 Surface Measurements With A Non-Contact Nomarski-Profiling Instrument

Thomas C. Bristow, Dag Lindquist

Proceedings Volume 0816, Interferometric Metrology; (1987) https://doi.org/10.1117/12.941759
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

This paper presents measurements of surface features from a variety of surfaces using a non-contact, long scan surface profiler. Data is presented emphasizing the waviness and roughness of the surface. Several different types of samples are presented, including the surface of a diamond turned mirror, computer hard disk, machine tool surface, and film. The instrument used for these measurements has a resolution of 1 Angstrom and has a scan length up to 100 millimeters.

Citation Download Citation

Thomas C. Bristow and Dag Lindquist "Surface Measurements With A Non-Contact Nomarski-Profiling Instrument", Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); https://doi.org/10.1117/12.941759

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