Analysis Of Particulate Contamination Buildup On Surfaces

J. D. Buch; M. K. Barsh

doi:10.1117/12.967066

1 January 1987 Analysis Of Particulate Contamination Buildup On Surfaces

J. D. Buch, M. K. Barsh

Proceedings Volume 0777, Optical Systems Contamination: Effects, Measurement, Control; (1987) https://doi.org/10.1117/12.967066
Event: 1987 Technical Symposium Southeast on Optics, Electro-Optics, and Sensors, 1987, Orlando, FL, United States

Abstract

A method is derived for estimating the relationships between clean room air cleanliness class (FED-STD-209B), exposure time and surface cleanliness level (MIL-STD-1246A). The basis of the method is extrapolation of Hamberg's data on particulate fallout rates observed in clean rooms (J. Envr. Sci. May/June, p.15, 1982). The results are presented in simplified form to estimate clean room requirements for different surface cleanliness levels. A discussion is provided on the particle size distributions observed by Hamberg and Shon (30th Ann. Mtg., Institute for Environmental Sciences).

Citation Download Citation

J. D. Buch and M. K. Barsh "Analysis Of Particulate Contamination Buildup On Surfaces", Proc. SPIE 0777, Optical Systems Contamination: Effects, Measurement, Control, (1 January 1987); https://doi.org/10.1117/12.967066

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