Three-Dimensional Surface Metrology Using A Computer Controlled Non-Contact Instrument

James C. Wyant; Keith N. Prettyjohns

doi:10.1117/12.938628

25 November 1986 Three-Dimensional Surface Metrology Using A Computer Controlled Non-Contact Instrument

James C. Wyant, Keith N. Prettyjohns

Proceedings Volume 0661, Optical Testing and Metrology; (1986) https://doi.org/10.1117/12.938628
Event: 1986 Quebec Symposium, 1986, Quebec City, Canada

Abstract

This paper describes a non-contact three dimensional surface profiler. The instrument is based upon direct phase measurement interferometry using a microscope to measure surface heights over an area from 0.25 mm square to 4.0 mm square. A 256 X 256 element photodiode detector array is used as the image sensor. Computer software has been written to control the instrument, and perform the phase measurement and full statistical and Fourier analysis of the surface. Results are shown of measurements for a variety of surfaces tested.

Citation Download Citation

James C. Wyant and Keith N. Prettyjohns "Three-Dimensional Surface Metrology Using A Computer Controlled Non-Contact Instrument", Proc. SPIE 0661, Optical Testing and Metrology, (25 November 1986); https://doi.org/10.1117/12.938628

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