Quantitative Voltage Measurement By A Software Closed Loop Technique In Electron Beam Testing

Yasuo Furukawa; Yoshiro Goto; Toshihiro Ishizuka; Kazuo Ookubo; Takefumi Inagaki

doi:10.1117/12.963689

30 June 1986 Quantitative Voltage Measurement By A Software Closed Loop Technique In Electron Beam Testing

Yasuo Furukawa, Yoshiro Goto, Toshihiro Ishizuka, Kazuo Ookubo, Takefumi Inagaki

Proceedings Volume 0632, Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V; (1986) https://doi.org/10.1117/12.963689
Event: 1986 Microlithography Conferences, 1986, Santa Clara, United States

Abstract

A software closed loop technique was devised for quantitative voltage measurement in electron beam testing for LSIs. A retarding voltage of an energy analyzer is controlled iteratively by a computer to reduce difference between a slice level and a secondary electron signal to zero. The voltage is determined by the retarding voltage at the cross point of the slice level and the energy distribution curve. Using this technique, the waveform of 256 sampling phases with more than 5 V amplitude can be measured in about 30 s with 200 mV voltage resolution and 100 ps time resolution.

Citation Download Citation

Yasuo Furukawa, Yoshiro Goto, Toshihiro Ishizuka, Kazuo Ookubo, and Takefumi Inagaki "Quantitative Voltage Measurement By A Software Closed Loop Technique In Electron Beam Testing", Proc. SPIE 0632, Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V, (30 June 1986); https://doi.org/10.1117/12.963689

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