Polydimethylglutarimide (PMGI) Resist - A Progress Report

A W. McCullough; D. A. Vidusek; M. W. Legenza; M. de Grandpre; J. Imhof

doi:10.1117/12.963658

9 July 1986 Polydimethylglutarimide (PMGI) Resist - A Progress Report

A W. McCullough, D. A. Vidusek, M. W. Legenza, M. de Grandpre, J. Imhof

Proceedings Volume 0631, Advances in Resist Technology and Processing III; (1986) https://doi.org/10.1117/12.963658
Event: 1986 Microlithography Conferences, 1986, Santa Clara, United States

Abstract

PMGI is a recently developed polymer which has features that make it of interest to the semiconductor industry. Some recent work and applications of this polymer are presented. Emphasis is placed on incremental results and on the achievement of consistency in the behavior of the polymer. The material is currently under evaluation at a number of different sites.

Citation Download Citation

A W. McCullough, D. A. Vidusek, M. W. Legenza, M. de Grandpre, and J. Imhof "Polydimethylglutarimide (PMGI) Resist - A Progress Report", Proc. SPIE 0631, Advances in Resist Technology and Processing III, (9 July 1986); https://doi.org/10.1117/12.963658

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