EYESEE tm: A Computer Vision System For Inspection Of Integrated Circuits

Michael L. Baird

doi:10.1117/12.941926

29 June 1984 EYESEE ^tm: A Computer Vision System For Inspection Of Integrated Circuits

Michael L. Baird

Proceedings Volume 0470, Optical Microlithography III: Technology for the Next Decade; (1984) https://doi.org/10.1117/12.941926
Event: 1984 Microlithography Conferences, 1984, Santa Clara, United States

Abstract

A completely automated vision system for inspection of in-process and fully patterned integrated circuits (ICs) has been demonstrated. Applied to the inspection of a Darlington IC, the EYESEE system is shown to effectively replace an operator in performing inspections such as those called for in MIL-STD-883B, method 2010. EYESEE has been extended to inspection of certain LSI and VLSI devices for characterization and measurement of line widths and critical dimensions, mask and reticle registration accuracy, and gross and fine defects. EYESEE general video image processing technology has reached the point where technical feasibility has been established for automating many semiconductor inspection tasks. A comprehensive review of other relevant computer vision techniques used within the semiconductor manufacturing industry is presented.

Citation Download Citation

Michael L. Baird "EYESEE ^tm: A Computer Vision System For Inspection Of Integrated Circuits", Proc. SPIE 0470, Optical Microlithography III: Technology for the Next Decade, (29 June 1984); https://doi.org/10.1117/12.941926

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