Wafer Flatness: An Overview Of Measurement Considerations And Equipment Correlation

David C. Guidici

doi:10.1117/12.957188

17 July 1979 Wafer Flatness: An Overview Of Measurement Considerations And Equipment Correlation

David C. Guidici

Proceedings Volume 0174, Developments in Semiconductor Microlithography IV; (1979) https://doi.org/10.1117/12.957188
Event: Developments in Semiconductor Microlithography IV, 1979, San Jose, United States

Abstract

The trend toward smaller device geometries to afford more die per wafer and the advances in photolithographic technology have resulted in the evergrowing use of projection printing systems which can routinely produce two micron lines. Image distortion has become critical and because it is difficult to compensate for a lack of flatness by either mechanical or optical means, wafer flatness has been afforded increasing importance as a silicon material parameter. This paper will offer an overview of the most typical wafer flatness test methods. It will demonstrate the importance of contamination considerations, show how flatness measurements are affected by vacuum chuck geometries, inches of mercury of clamping vacuum and review currently available equipment. Also, principles of operation are described and the scanning, and laser interferometric testing systems.

Citation Download Citation

David C. Guidici "Wafer Flatness: An Overview Of Measurement Considerations And Equipment Correlation", Proc. SPIE 0174, Developments in Semiconductor Microlithography IV, (17 July 1979); https://doi.org/10.1117/12.957188

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available