A New Automatic Ellipsometer

Grant M. Miles

doi:10.1117/12.955008

22 October 1976 A New Automatic Ellipsometer

Grant M. Miles

Proceedings Volume 0088, Polarized Light: Instruments, Devices, Applications; (1976) https://doi.org/10.1117/12.955008
Event: 20th Annual Technical Symposium, 1976, San Diego, United States

Abstract

The design and performance of a new automatic ellipsometer is described. The instrument is of the balancing or null-seeking type, using Faraday modulators to detect out-of-balance conditions, stepper motors to drive the polarizing and analyzing prisms, and Moire fringe counters to measure the angles of the prisms.

Citation Download Citation

Grant M. Miles "A New Automatic Ellipsometer", Proc. SPIE 0088, Polarized Light: Instruments, Devices, Applications, (22 October 1976); https://doi.org/10.1117/12.955008

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