Photomask Terminology

Phillip A. Schultz; Dino R. Ciarlo

doi:10.1117/12.954243

1 March 1974 Photomask Terminology

Phillip A. Schultz, Dino R. Ciarlo

Proceedings Volume 0055, Technological Advances in Micro and Submicro Photofabrication Imagery; (1974) https://doi.org/10.1117/12.954243
Event: Acquisition and Analysis of Pictorial Data, 1974, San Diego, United States

Abstract

Standardization of terminology in the IC photomask industry needs to be accomplished in the near future. Some of the difficulties usually encountered when attempting standardization, as well as suggestions on how to approach standardization are discussed. Over 125 repre-sentative IC photomask terms have been selected, categorized, and defined.

Citation Download Citation

Phillip A. Schultz and Dino R. Ciarlo "Photomask Terminology", Proc. SPIE 0055, Technological Advances in Micro and Submicro Photofabrication Imagery, (1 March 1974); https://doi.org/10.1117/12.954243

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