Optical Tests For Mechanical Performance Of Modern Step-And-Repeat Cameras

Jeremy D. Nichols

doi:10.1117/12.954250

1 March 1974 Optical Tests For Mechanical Performance Of Modern Step-And-Repeat Cameras

Jeremy D. Nichols

Proceedings Volume 0055, Technological Advances in Micro and Submicro Photofabrication Imagery; (1974) https://doi.org/10.1117/12.954250
Event: Acquisition and Analysis of Pictorial Data, 1974, San Diego, United States

Abstract

Step-and-repeat cameras are relatively simple machines from a mechanical viewpoint but since the integrated circuit industry's tolerances are so small the burden of performance placed upon these machines is great. Mechanical performance tests are sometimes done as part of a series of general acceptance tests upon delivery of a new camera but are most often called upon to help locate trouble in an existing machine.

Citation Download Citation

Jeremy D. Nichols "Optical Tests For Mechanical Performance Of Modern Step-And-Repeat Cameras", Proc. SPIE 0055, Technological Advances in Micro and Submicro Photofabrication Imagery, (1 March 1974); https://doi.org/10.1117/12.954250

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