Microalignment Of Vacuum Deposited Thin-Film Imagery

G. Kramer; J. M. Graf

doi:10.1117/12.954258

1 March 1974 Microalignment Of Vacuum Deposited Thin-Film Imagery

G. Kramer, J. M. Graf

Proceedings Volume 0055, Technological Advances in Micro and Submicro Photofabrication Imagery; (1974) https://doi.org/10.1117/12.954258
Event: Acquisition and Analysis of Pictorial Data, 1974, San Diego, United States

Abstract

This paper discusses the additive thin-film technology developed and employed at Aerojet. The rationale for the selection of an additive thin-film process, the fixturing, tooling and alignment techniques employed in this technology, the fabrication of the deposition masks, and some examples of the resulting thin-film imagery are described.

Citation Download Citation

G. Kramer and J. M. Graf "Microalignment Of Vacuum Deposited Thin-Film Imagery", Proc. SPIE 0055, Technological Advances in Micro and Submicro Photofabrication Imagery, (1 March 1974); https://doi.org/10.1117/12.954258

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