Presentation
20 June 2024 On the benefit of external pulse compression below 100fs for micromachining applications
Author Affiliations +
Abstract
External pulse compression offers the possibility to shorten the pulse duration of industrial grade femtosecond lasers from 300 to 500 fs well below 100 fs with an efficiency of typically 90%. We nvestigated the sub 100 fs regime for industrial laser micromachining processes. We show first results of a parametric study on ablation efficiency varying the pulse duration over 2 orders of magnitude, from 57 fs to 5 ps. We further characterize the micro-processing quality in terms of the surface roughness and the minimum achievable structure size for metals, semiconductors and glasses with an industrial grade Carbide laser from Light conversion at a wavelength of 1030 nm in combination with MIKS1 S pulse compressor from N2 Photonics (offering sub 100 fs pulses) and a high end Excelliscan galvo scanner from Scanlab for repetition rates from 80 kHz up to 1.2 MHz.
Conference Presentation
© (2024) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rainer Kling and Beat Neuenschwander "On the benefit of external pulse compression below 100fs for micromachining applications", Proc. SPIE PC13005, Laser + Photonics for Advanced Manufacturing , PC130050N (20 June 2024); https://doi.org/10.1117/12.3028718
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KEYWORDS
Micromachining

Industrial applications

Femtosecond pulse shaping

Laser ablation

Metals

Picosecond phenomena

Pulsed laser operation

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