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13 March 2024 3D printing glass micro-optics from silsesquioxanes
Piaoran Ye, Zhihan Hong, Rongguang Liang, Douglas Loy
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Proceedings Volume PC12898, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII; PC128980C (2024) https://doi.org/10.1117/12.3005589
Event: SPIE OPTO, 2024, San Francisco, California, United States
Abstract
We developed a series of photo-curable liquid resins containing silsesquioxane or silsesquioxane-structured molecules, which were subsequently utilized in a two-photon polymerization printing strategy. The printed structures underwent a controlled thermal treatment, converting them into inorganic glass while maintaining a temperature below the glass transition temperature of silica. Our investigation focused on elucidating the influence of the molecular composition of the resin on its intrinsic properties, print quality, and dimensional changes during the thermal conversion process. Our results underscore the capability of this approach to fabricate micro-optics with exceptional precision and complexity, thereby showcasing its potential for advancing micro-optical device fabrication.
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(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Piaoran Ye, Zhihan Hong, Rongguang Liang, and Douglas Loy "3D printing glass micro-optics from silsesquioxanes", Proc. SPIE PC12898, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII, PC128980C (13 March 2024); https://doi.org/10.1117/12.3005589
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KEYWORDS
Glasses
Micro optics
3D printing
Printing
Nanolithography
Polymers
Shrinkage
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