Superconducting nanowire single-photon detectors (SNSPDs) are a key building block in photon-based quantum computation and communication. To realize a scalable photonic device, integration of SNSPDs on waveguides is necessary. Hereby, one of the most promising waveguide materials is lithium niobate-on-insulator (LNOI). To find the ideal superconductor growth conditions, in this case NbTiN on LNOI, we created a series of superconducting films, while varying the superconductors stoichiometry. Here, the produced SNSPDs become more sensitive at a higher nitrogen content, while for lower amounts of nitrogen the recovery time is reduced, allowing for a direct correlation of sputter conditions and SNSPD performance.
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