Fabrication of high aspect ratio structures for meta-surface optics

D. Bruce Burckel; Katherine M. Musick; Travis R. Young; Loren Gastian; John Mudrick

doi:10.1117/12.2678379

4 October 2023 Fabrication of high aspect ratio structures for meta-surface optics

D. Bruce Burckel, Katherine M. Musick, Travis R. Young, Loren Gastian, John Mudrick

Proceedings Volume PC12646, Metamaterials, Metadevices, and Metasystems 2023; PC126460T (2023) https://doi.org/10.1117/12.2678379
Event: SPIE Nanoscience + Engineering, 2023, San Diego, California, United States

Abstract

Fabrication of structures with high aspect ratios (HAR) enables creation of metasurface optics with ever-increasing functionality. Dielectric meta-atoms consist of transverse (x,y) shapes extruded in the z-dimension. The phase discontinuity imparted by the meta-atom is a function of the dielectric constant of the material and the z-height of the meta-atom. The performance of the meta-optic improves with larger phase swings. Here we demonstrate HAR etched structures in silicon and gallium arsenide. Initial etch development employs interferometric lithography while final patterns are realized using e-beam patterning. The paper will discuss this etch development process for both material sets.

Conference Presentation

Citation Download Citation

D. Bruce Burckel, Katherine M. Musick, Travis R. Young, Loren Gastian, and John Mudrick "Fabrication of high aspect ratio structures for meta-surface optics", Proc. SPIE PC12646, Metamaterials, Metadevices, and Metasystems 2023, PC126460T (4 October 2023); https://doi.org/10.1117/12.2678379

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