Holographic interferometric microscope for complete displacement determination

Oliver Kruschke; Guenther K.G. Wernicke; Torsten Huth; Nazif Demoli; Hartmut Gruber

doi:10.1117/1.601420

1 September 1997 Holographic interferometric microscope for complete displacement determination

Oliver Kruschke, Guenther K.G. Wernicke, Torsten Huth, Nazif Demoli, Hartmut Gruber

Optical Engineering, Vol. 36, Issue 9, (September 1997). https://doi.org/10.1117/1.601420

Holographic microscopy for the simultaneous interferometric determination of all displacement components is described. The recording and the evaluation procedures are optimized by three illumination directions and conjugate reconstruction, respectively. Microscopic observation is completely separated from holographic recording. The holographic microscope performs maximum flexibility of magnification combined with high imaging accuracy. The phase-shift technique and Fourier analysis with a carrier frequency are applied for interferogram evaluation. Both methods are compared regarding the measurement range, accuracy, and handling. In-plane and out-of-plane displacement components can be measured simultaneously by both evaluation methods. A cantilever beam, a circular plate, and a surface-mounted microresistor are used to demonstrate the capabilities of the holographic microscope.

Citation Download Citation

Oliver Kruschke, Guenther K.G. Wernicke, Torsten Huth, Nazif Demoli, and Hartmut Gruber "Holographic interferometric microscope for complete displacement determination," Optical Engineering 36(9), (1 September 1997). https://doi.org/10.1117/1.601420

Published: 1 September 1997

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available