Research on path planning and data processing system for high-precision aspheric measurement

Jun-jun Ye; Jiang Guo; Yin-biao Guo

doi:10.1117/12.783800

17 January 2008 Research on path planning and data processing system for high-precision aspheric measurement

Jun-jun Ye, Jiang Guo, Yin-biao Guo

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67235R (2008) https://doi.org/10.1117/12.783800
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

Three methods for axisymmetric aspheric measuring are put forward and estimated. In accordance with the requirements of high-precision compensation machining and polishing, a data processing system with high accuracy is presented. The monotonous and super-quadric aspheric equations are used to verify the nonlinear least square fitting method respectively. The result of this investigation shows the adopted algorithm can complete the high-precise curve fitting exactly, and it can effectively evaluate the surface quality of optical component.

Citation Download Citation

Jun-jun Ye, Jiang Guo, and Yin-biao Guo "Research on path planning and data processing system for high-precision aspheric measurement", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67235R (17 January 2008); https://doi.org/10.1117/12.783800

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