Research on dual-purpose optical aspheric surface testing instrument

Jianchun Liu; Yinbiao Guo; Gujin Liu

doi:10.1117/12.783663

17 January 2008 Research on dual-purpose optical aspheric surface testing instrument

Jianchun Liu, Yinbiao Guo, Gujin Liu

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67234Q (2008) https://doi.org/10.1117/12.783663
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

Aiming at various influential factors during ultra-precision aspheric surface testing, besides improving the accuracy of moving stage and measuring probe, systematic errors in measurements should be minimized. In this paper, the principle of measuring, configuration and design of a new type dual-purpose optical aspheric testing instrument are introduced. Both contact and non-contact measurement methods are used. The performance and cost of this dual-purpose instrument are better than single purpose instrument.

Citation Download Citation

Jianchun Liu, Yinbiao Guo, and Gujin Liu "Research on dual-purpose optical aspheric surface testing instrument", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67234Q (17 January 2008); https://doi.org/10.1117/12.783663

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