Application of two-frequency laser interferometer in dynamic calibrating of long displacement sensor

Wanfu Dong; Bin Wu; Fuchun Sun

doi:10.1117/12.783592

17 January 2008 Application of two-frequency laser interferometer in dynamic calibrating of long displacement sensor

Wanfu Dong, Bin Wu, Fuchun Sun

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 672343 (2008) https://doi.org/10.1117/12.783592
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

Difficulties of automatic calibration for long displacement sensors have been overcome by applying two-frequency laser interferometer with two-longitudinal modes for standard displacement. High efficient automatic calibration has been achieved for long displacement sensor of 500mm. The total measuring uncertainty of the system is less than 2μm. The speed of dynamic measurement can be more than 20mm/s. Main work of the calibration is automatically completed by controlling the micro-computer system.

Citation Download Citation

Wanfu Dong, Bin Wu, and Fuchun Sun "Application of two-frequency laser interferometer in dynamic calibrating of long displacement sensor", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 672343 (17 January 2008); https://doi.org/10.1117/12.783592

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