Mechanical instabilities and piezoresistivity of SiGe/Si microtubes

Li Zhang; Lixin Dong; Bradley J. Nelson

doi:10.1117/12.754396

10 September 2007 Mechanical instabilities and piezoresistivity of SiGe/Si microtubes

Li Zhang, Lixin Dong, Bradley J. Nelson

Proceedings Volume 6717, Optomechatronic Micro/Nano Devices and Components III; 67170G (2007) https://doi.org/10.1117/12.754396
Event: International Symposium on Optomechatronic Technologies, 2007, Lausanne, Switzerland

Abstract

Mechanical instabilities and piezoresistivity of individual rolled-up SiGe/Si microtubes are investigated using nanorobotic manipulation. By applying this technique, as-fabricated one-end-fixed SiGe/Si microtubes can be cut and picked up from the substrate to examine their mechanical and electromechanical properties in a free space. Individual SiGe/Si microtubes show typical Euler buckling when the uniaxial compressive load is larger than a critical value. Moreover, experiments show that 1.6-turn rolled-up SiGe/Si microtubes have similar mechanical stability to ideal seamless tubes though the former ones have a spiral-like cross sectional area instead of an ideal ring. According to the measured I-V properties, SiGe/Si microtubes show positive piezoresistivity under compressive loads.

Citation Download Citation

Li Zhang, Lixin Dong, and Bradley J. Nelson "Mechanical instabilities and piezoresistivity of SiGe/Si microtubes", Proc. SPIE 6717, Optomechatronic Micro/Nano Devices and Components III, 67170G (10 September 2007); https://doi.org/10.1117/12.754396

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