Image processing method in measuring tiny surface with projecting grating profilometry

Jianqiang Xu; Yunshan Wang; Dazhen Yun

doi:10.1117/12.468842

29 May 2002 Image processing method in measuring tiny surface with projecting grating profilometry

Jianqiang Xu, Yunshan Wang, Dazhen Yun

Proceedings Volume 4537, Third International Conference on Experimental Mechanics; (2002) https://doi.org/10.1117/12.468842
Event: Third International Conference on Experimental Mechanics, 2002, Beijing, China

Abstract

In three-dimensional projecting grating profilometry, we are often persecuted by some disgusted phenomenon of images, such as reflecting flare, overlapping of grating and other noises. All these can bring a bigger error in image processing. The intention of this paper is to propose some new methods of image processing. The technique we applied is based on frequency domain digital image processing, morphology method and partial handling method. As the background disturbance can be eliminated by frequency domain filter, many image noises can be suppressed and the distinguishing feature of grating can be accentuated by morphology method with suitable structure element and partial handling method. Thereby, the result of the surface shape can be calculated much better than the conventional method. The results of experiment indicate that new methods have remarkable effects.

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Jianqiang Xu, Yunshan Wang, and Dazhen Yun "Image processing method in measuring tiny surface with projecting grating profilometry", Proc. SPIE 4537, Third International Conference on Experimental Mechanics, (29 May 2002); https://doi.org/10.1117/12.468842

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KEYWORDS

Image processing

Binary data

Fourier transforms

Image filtering

Dubnium

Image quality

Linear filtering

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