Infrared phase-shifting digital interferometer

Jinbang Chen; Lei Chen; Shenwang Huang; Guoyou Jin

doi:10.1117/12.253083

3 October 1996 Infrared phase-shifting digital interferometer

Jinbang Chen, Lei Chen, Shenwang Huang, Guoyou Jin

Proceedings Volume 2899, Automated Optical Inspection for Industry; (1996) https://doi.org/10.1117/12.253083
Event: Photonics China '96, 1996, Beijing, China

Abstract

This paper describes theory and performance of a self- developed IR phase-shifting digital interferometer which uses a CO₂ laser as light source, this instrument comprises of a Fizeau interferometer whose aperture reaches (Phi) 250mm with accuracy better than (lambda) /50, and a Twyman spherical interferometer. Using piezoelectric transducer to shift reference mirror, phase measurement interferometry can be carried out as well as the temperature modulation of PEV target. A series of software packages used as wavefront fitting, image quality evaluation, are incorporated into the instrument. With the help of microcomputer, this interferometric system can measure refractive-index homogeneity of IR transmitting materials, wavefront error of IR optical system and surface quality of rough surface etc., which can all be shown by detailed data of optical path difference, vivid 2D contour and 3D surface.

Citation Download Citation

Jinbang Chen, Lei Chen, Shenwang Huang, and Guoyou Jin "Infrared phase-shifting digital interferometer", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); https://doi.org/10.1117/12.253083

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