Research on measurement method of submicron linewidth based on microscopic vision

Chong Yue; YueQing Ding; Lei Tao; Xin Chen; Jin Zhou

doi:10.1117/12.2666760

4 April 2023 Research on measurement method of submicron linewidth based on microscopic vision

Chong Yue, YueQing Ding, Lei Tao, Xin Chen, Jin Zhou

Proceedings Volume 12617, Ninth Symposium on Novel Photoelectronic Detection Technology and Applications; 1261770 (2023) https://doi.org/10.1117/12.2666760
Event: 9th Symposium on Novel Photoelectronic Detection Technology and Applications (NDTA 2022), 2022, Hefei, China

Abstract

In this paper, a submicron linewidth measurement method based on computer microscopic imaging technology to improve the measuring precision is proposed. Firstly, the microscopic image of the standard line pair is taken at the magnification M, and the pixel representing distance (PRD) of the microscopic image is calibrated. Secondly, the noise of the image is eliminated by the median filtering technology, and then the minimum ambiguity criterion of direction information measurement is used to quickly identify the edge boundary points of linewidth. Then, the edge points of the linewidth are fitted and filled to form a regular geometry shape, which can be accurately located by using the cascaded Hough transform algorithm. Finally, in order to verify the validity of the method, several representative linewidths are selected on the standard sample plate to repeat the measurement nine times, the experimental results show that for line width greater than 2 μ m, the error of measuring linewidth with the method studied in this paper is less than 0.1 μ m. Therefore, this method reveals the possibility of high-precision measurement of linewidth through microscopic images, and makes it be a much better option to be employed for further micro-nano structures analysis applications.

Citation Download Citation

Chong Yue, YueQing Ding, Lei Tao, Xin Chen, and Jin Zhou "Research on measurement method of submicron linewidth based on microscopic vision", Proc. SPIE 12617, Ninth Symposium on Novel Photoelectronic Detection Technology and Applications, 1261770 (4 April 2023); https://doi.org/10.1117/12.2666760

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Image processing

Digital filtering

Technology

Nonlinear filtering

Calibration

Hough transforms

Image filtering

Show All Keywords

Keywords/Phrases

Search In:

Publication Years