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Novel, fast, edge-directed image reconstruction algorithm using a substepping system for critical-dimension measurement of glass panels

[+] Author Affiliations
Nam-Thai Doan

Seoul National University, School of Mechanical and Aerospace Engineering, 599 Gwanak-ro, Gwanak-gu, Seoul, 151-742, South Korea

Jun-Hee Moon

Yuhan College, Department of Mechanical Design, Bucheon-si, Gyeonggi-do, 442-749, South Korea

Tai-Wook Kim

Seoul National University, School of Mechanical and Aerospace Engineering, 599 Gwanak-ro, Gwanak-gu, Seoul, 151-742, South Korea

Heui-Jae Pahk

Seoul National University, School of Mechanical and Aerospace Engineering, 599 Gwanak-ro, Gwanak-gu, Seoul, 151-742, South Korea

J. Electron. Imaging. 21(3), 033028 (Sep 14, 2012). doi:10.1117/1.JEI.21.3.033028
History: Received April 2, 2012; Revised July 27, 2012; Accepted August 10, 2012
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Abstract.  We report a system for performing critical-dimension (CD) measurements of glass panels that uses a substepping system to generate a sequence of lower-resolution images and a fast, edge-directed image reconstruction algorithm to combine these images into a higher-resolution image. A large working distance and large aperture of microscope objective is required in glass panel manufacturing, to measure very small distances at high-level repeatability in a short time, which in turn allows only low magnification objectives. Low-resolution images are obtained when the camera of the CD measurement system is moved at step intervals smaller than the normal pixel size of the camera sensor. We propose a fast, edge-directed image registration (IR) algorithm to find the subpixel accuracy information for full-size images to be registered. The number of processed pixels is only about 5% to 10% of the number of pixels in the image, and the algorithm runs noniteratively. Thus, the subpixel IR algorithm is faster than other methods. In addition, a weighting calculation method for fast and robust edge-directed image interpolation algorithm is proposed to form a high-resolution image. Our experimental results prove that the proposed method offers faster processing time than the standard process and acceptable repeatability of CD measurements.

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© 2012 SPIE and IS&T

Citation

Nam-Thai Doan ; Jun-Hee Moon ; Tai-Wook Kim and Heui-Jae Pahk
"Novel, fast, edge-directed image reconstruction algorithm using a substepping system for critical-dimension measurement of glass panels", J. Electron. Imaging. 21(3), 033028 (Sep 14, 2012). ; http://dx.doi.org/10.1117/1.JEI.21.3.033028


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