Special Section on Quality Control by Artificial Vision

Single-shot surface profiling by multiwavelength interferometry without carrier fringe introduction

[+] Author Affiliations
Katsuichi Kitagawa

Toray Engineering Co., Ltd., Research and Development Center, Electronics Division, 1-1-45, Oe, Otsu 520-2141, Japan

J. Electron. Imaging. 21(2), 021107 (May 10, 2012). doi:10.1117/1.JEI.21.2.021107
History: Received September 14, 2011; Revised December 18, 2011; Accepted January 9, 2012
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Abstract.  As a single-shot interferometric technique, spatial carrier interferometry has been thoroughly investigated, and it has been shown to have some problems, such as low spatial resolution. To overcome the problems, we propose a novel single-shot surface profiling technique that does not require carrier introduction. It is based on a model-fitting algorithm and estimates the model parameters and the heights of plural points simultaneously based on their multiwavelength intensity data. The validity of the proposed method is demonstrated by computer simulations and actual experiments.

© 2012 SPIE and IS&T

Citation

Katsuichi Kitagawa
"Single-shot surface profiling by multiwavelength interferometry without carrier fringe introduction", J. Electron. Imaging. 21(2), 021107 (May 10, 2012). ; http://dx.doi.org/10.1117/1.JEI.21.2.021107


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